A miniature, high‐sensitivity, electron‐tunneling accelerometer

Characterisation of a Highly Symmetrical Miniature Capacitive Triaxial Accelerometer

polyimide (PI) as flexible interconnection layer between the W mass W house and movatile capacitor plate capacitor plates. The sensor structure and its basic operating A A principle, its mathematical mass-spring-damper model and the necessary cleanroom technology are described. The measurement results show a sensitivity of 0.15 V/(m/s2) with a corresponding resolution of 0.01 m/s2, an off-axis ...

A microchip optomechanical accelerometer

The monitoring of accelerations is essential for a variety of applications ranging from inertial navigation to consumer electronics [1]. The basic operation principle of an accelerometer is to measure the displacement of a flexibly mounted test mass; sensitive displacement measurement can be realized using capacitive [2, 3], piezo-electric [4], tunnel-current [5], or optical [6–9] methods. Whil...

A Modular Mems Accelerometer Concept

Presently, main applications can be found in the automotive market segment (e.g. front and side airbag sensors, ESP respectively chassis stabilization, active suspension, roll over detection). However, low-g sensors enter also new application areas like inclinometry and vibration sensing for instance for anti-theft devices or activity monitoring for pacemaker control. Like in the microelectroni...

Micropropagation of miniature rose cultivars

A Paper-Based Piezoelectric Accelerometer

This paper presents the design and testing of a one-axis piezoelectric accelerometer made from cellulose paper and piezoelectric zinc oxide nanowires (ZnO NWs) hydrothermally grown on paper. The accelerometer adopts a cantilever-based configuration with two parallel cantilever beams attached with a paper proof mass. A piece of U-shaped, ZnO-NW-coated paper is attached on top of the parallel bea...